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Implementation of Piezoelectric Displacement Generators and Advanced Noise Reduction Algorithms in Surface Texture Measurement

Funder: Croatian Science Foundation (CSF)Project code: IP-2024-05-3450
Funded under: Research Projects Funder Contribution: 91,080 EUR

Implementation of Piezoelectric Displacement Generators and Advanced Noise Reduction Algorithms in Surface Texture Measurement

Description

Stylus instruments are the most used measurement systems for examining surface texture conditions. Increasingly narrow tolerance limits, especially in the semiconductor industry as well as in medical and pharmaceutical industries, pose new challenges in the field of surface texture metrology. The only way to meet these requirements is to reduce the measurement uncertainty of results. To achieve this, it is necessary to reduce the noise embedded in the measurement result, as noise is one of the two largest contributors to the uncertainty of measurement results. The other significant contributor to measurement uncertainty is the uncertainty of the standards used in the calibration of stylus instruments.The goal of this research project is to achieve uncertainty of calibration results for stylus instruments below 100 nm. The project will focus on implementing advanced noise reduction algorithms and the use of piezo displacement generators for calibrating stylus instruments, aiming to achieve high precision and accuracy of roughness measurement results while meeting the targeted measurement uncertainty.The project aims to enhance scientific knowledge about new procedures for ensuring traceability of surface texture measurement devices and researching methods for noise reduction in signals, representing the cutting edge of scientific research in this field. By achieving these project goals, the Croatian National Laboratory for Length will have the opportunity to join a very exclusive group of leading scientific research organizations currently working on this scientific research, which will define the future of surface texture measurements.

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