Optimized Low-Voltage Multi-Beam Electron Microscope and High Throughput CL detection
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Investigating materials at the highest possible resolution with electron microscopy is crucial for understanding diseases and for quality control in manufacturing computer chips. At present, electron microscopes image samples with only one beam, which makes them too slow to image samples larger than about 1 mm. The researchers will implement several innovations to make an electron microscope that can illuminate samples with many beams in parallel and that is also very sensitive to signals generated specifically by defects in the materials.
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