Smart Multilayer Interactive Optics for Lithography at Extreme UV wavelengths (‘SMILE’)

assignment_turned_inproject01 Aug 2010(Started)-31 Oct 2014(Ended)Closed

Funder: Netherlands Organisation for Scientific Research (NWO)Project code: 10448

Smart Multilayer Interactive Optics for Lithography at Extreme UV wavelengths (‘SMILE’)

- Summary
- DMPs

Partners

VU , Vrije Universiteit Amsterdam, Faculteit der Bètawetenschappen (Faculty of Science), Center for Neurogenomics and Cognitive Research (CNCR), Integrative Neurophysiology

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Start a new DMP in Argos

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<script type="text/javascript">
<!--
document.write('<div id="oa_widget"></div>');
document.write('<script type="text/javascript" src="https://www.openaire.eu/index.php?option=com_openaire&view=widget&format=raw&projectId=nwo_________::b0eeffad438fd186126c11fecdceab44&type=result"></script>');
-->
</script>

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Smart Multilayer Interactive Optics for Lithography at Extreme UV wavelengths (‘SMILE’)

Smart Multilayer Interactive Optics for Lithography at Extreme UV wavelengths (‘SMILE’)

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